MANUFACTURING METHOD OF PIEZOELECTRIC CERAMIC MULTILAYER ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a piezoelectric ceramic multilayer actuator.;SOLUTION: Each block of a deposited green sheet and having an inner electrode is laminated. At least one actuator is taken out from the block and is treated to form its shape, and is sintered continuously. While a sintered coating generated in the sintering process is used as an insulating layer, the sintered coating is cut at a position, at which the inner electrode is contacted with an outer electrode.;COPYRIGHT: (C)2002,JPO