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Production manner of multilayer piezoelectric ceramic actuator, and multilayer piezoelectric ceramic actuator

机译:多层压电陶瓷致动器的生产方式及多层压电陶瓷致动器

摘要

A piezoceramic multilayer actuator (10) comprises a plurality of piezoceramic layers (12), a security layer (20) and a plurality of inner electrodes (16, 18). The piezoceramic layers (12) comprise a piezoceramic first material sintered at a sintering temperature. The security layer (20) comprises a second material and is disposed between two piezoceramic layers (12). Each of the plurality of inner electrodes (16, 18) comprises a third material and is deposited between two piezoceramic layers (12). The degree of sintering of the second material is lower than the degree of sintering of the third material.
机译:压电陶瓷多层致动器(10)包括多个压电陶瓷层(12),安全层(20)和多个内部电极(16、18)。压电陶瓷层(12)包括在烧结温度下烧结的压电陶瓷第一材料。安全层(20)包括第二材料并且设置在两个压电陶瓷层(12)之间。多个内部电极(16、18)中的每个包括第三材料,并沉积在两个压电陶瓷层(12)之间。第二材料的烧结度低于第三材料的烧结度。

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