Interferometer type measuring device for shape or distance interval, for example, rough surface shape or distance interval

摘要

An interferometric measuring device for detecting the shape of rough surfaces includes a spatially coherent beam gun unit that emits a short time coherent and broad-band beam. The device is separated into a section containing the components of a modulation interferometer and the components of a measuring probe. The measuring probe is coupled to the modulation interferometer via an optical fiber arrangement, and used remotely from the modulation interferometer.