THIN Y-TYPE MAGNETOPUMBITE FILM, METHOD OF MANUFACTURING THE SAME, AND THIN FILM INDUCTOR USING THE FILM

摘要

PROBLEM TO BE SOLVED: To provide a thin Y-type magnetoplumbite film, having high magnetic permeability in GHz band.;SOLUTION: This thin Y-type magnetoplumbite film is formed on a single- crystal substrate 11, composed of an MgAl2O4 (111)-substrate heated to a temperature of ≥1,000°C by evaporating Ba, Me (Me=Mg, Zn, Co, Fe, or Ni), Fe, and O from a target 12, having a stoichiometric compositional ratio expressed by the chemical formula of Ba2Me2Fe12O22 by irradiating the target 12 with a prescribed pulsed laser beam from a KrF excimer laser 13 in a vacuum tank, while the inside of the tank is being maintained in a prescribed O2-pressure atmosphere.;COPYRIGHT: (C)2002,JPO