COIL UNIT FOR THIN FILM INDUCTOR MANUFACTURING METHOD OF COIL UNIT FOR THIN FILM INDUCTOR THIN FILM INDUCTOR AND MANUFACTURING METHOD OF THIN FILM INDUCTOR

摘要

The present invention relates to a coil unit for a thin film inductor, a method for manufacturing a coil unit for a thin film inductor, a method for manufacturing a thin film inductor and a thin film inductor. Coil unit for a thin film inductor according to the present invention, the insulating material having a double insulating layer of different materials; And a coil pattern embedded in upper and lower surfaces of the insulating material, wherein the coil pattern includes a coil pattern formed of a plurality of plating layers. In addition, the method of manufacturing a coil unit for a thin film inductor according to the present invention comprises the steps of: forming a first coil pattern on each of a pair of metal layers adhered to both surfaces of a substrate layer via an adhesive layer; Forming a first insulating layer to embed the first coil pattern; Forming the second coil pattern and the second insulating layer to embed a second coil pattern formed of a plurality of plating layers; Separating the pair of metal layers from the base layer; wherein the first insulating layer and the second insulating layer are formed of different materials.