Development of High Resistive and High Magnetization Soft Thin Film and Fabrication of Thin Film Inductors

摘要

The goals of the program was to develop soft magnetic films, fabricate test structures, to device a microwave inductor and integrate thin film inductor onto CMOS (complimentary metal oxide semiconductor). Six researchers from four different academic departments including materials science, physics, chemical engineering and electrical engineering have conducted their own research projects. This report contains six sub-reports for detailed information on the results.