DEVICE AND METHOD FOR SUCTION-HOLDING GLASS PLATE

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for suction-holding a glass plate, preventing the glass plate from getting dry by constantly supplying glass plate with water.;SOLUTION: This device for suction-holding the glass plate is provided with a holding surface table 14 with a liquid supply hole 20 and a plurality of suction holes 18 in a placing face 16 for placing the glass plate 12; a liquid supply means 42 communicating with the liquid supply hole 20 to allow water to flow out to the placing face 16; and an exhaust means 40 communicating with the suction holes 18.;COPYRIGHT: (C)2002,JPO