OPTICAL CHARACTERISTICS MEASURING DEVICE AND OPTICAL THIN FILM DEPOSITING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical thin film depositing device which is provided with an optical characteristics measuring device, in which the location of an optical thin film to be measured is easily adjusted to an optical system and which is capable of accurately measuring the optical characteristics of an optical thin film to be measured in situ at any time, if it is an optical thin film during film deposition without bringing an alter or deform the optical thin film to be measured.;SOLUTION: The optical thin film depositing device 10 is provided with a film depositing source 12, a film depositing chamber 14 for depositing the optical thin film, and the optical characteristics measuring device 22, provided adjacent to the film depositing chamber 14 via a partition 18 for measuring the optical characteristics of the optical thin film, and also provided with a stage 24, on which the optical thin film to be measured of which the optical characteristics is to be measured is placed, a light source 26, a light irradiating means 28, an integrating sphere 30 provided as a light collecting means, a spectrophotometer 32 for measuring the quantity of light collected by the integrating sphere, and a computing device 34 for computing the optical characteristics of the optical thin film, on the basis of the quantity of light measured by the spectrophotometer. The stage is rotated in the horizontal plane by a rotary shaft, provided for a communicating opening 38 and moved between the film depositing chamber and a measuring chamber.;COPYRIGHT: (C)2002,JPO