PROBE FOR DETECTING OR PROJECTING EVANESCENT LIGHT, ITS MANUFACTURING METHOD, SURFACE OBSERVATION DEVICE CONSTITUTED OF IT, EXPOSURE DEVICE, OPTICAL ELEMENT COMPOSED OF THE SYSTEM, AND INFORMATION PROCESSOR

摘要

PROBLEM TO BE SOLVED: To provide a probe that can be improved in evanescent light generat ing efficiency, in strength, and also in yield and productivity even when a lens is provided in the probe and detects or projects evanescent light, and to provide a method of manufacturing the probe, a surface observation device constituted of the probe, an exposure device, an optical element composed of the system, and an information processor.;SOLUTION: The probe which detects or projects evanescent light is constituted of a member having a plumb-like through hole and an aspheric lens provided in the through hole. The probe is manufactured by the method.;COPYRIGHT: (C)2002,JPO