EXPLORER HAVING GRATING COUPLER AND ITS MANUFACTURING METHOD, PROBE HAVING EXPLORER, INFORMATION PROCESSING DEVICE HAVING PROBE, SURFACE OBSERVATION DEVICE, EXPOSURE DEVICE, AND OPTICAL ELEMENT BY EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an explorer and its manufacturing method capable of manufacturing easily, and possible to be designed allowing an error of precision required in a manufacturing process, when manufacturing a grating having desired performance adaptive to the explorer shape on a waveguide layer on an explorer lower part, and also to provide a probe having the explorer, an information processing device having the probe, a surface observation device, an exposure device, and an optical element by the exposure device.;SOLUTION: This explorer equipped with a member having a pyramidal optical through-hole formed thereon and the waveguide layer positioned under the member has a constitution wherein the grating formed on the surface of the waveguide layer positioned under the member has a grating pattern determined from an interference pattern between a spherical wave in the explorer and a plane wave in the waveguide layer.;COPYRIGHT: (C)2003,JPO