SPECTRUM DATA PROCESSING METHOD OF TRANSMISSION TYPE ELECTRON MICROSCOPE USING ENERGY FILTER AND ITS TRANSMISSION TYPE ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide equipment which takes photos of element distribution and spectrum with high space resolution and high-energy resolution using a transmission type electron microscope having an energy filter. SOLUTION: When pictures are taken of element distribution of a sample and spectrum using the transmission type electron microscope of a energy filtering type, photography time of spectrum data concerning the element distribution or the spectrum pictured through a spectrometer, is time-shared so that it can respond to a drift of the sample. The plurality of data obtained by time sharing picturing are indexed as to their position and integrated and calculated by deducting background, to obtain the element distribution picture or spectrum by which the drift correction is carried out.