PHASE GRATING MASK, METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE TYPE DIFFRACTION GRATING ELEMENT, AND OPTICAL WAVEGUIDE TYPE DIFFRACTION GRATING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method, etc., for manufacturing an optical waveguide type diffraction grating element having multiple reflection wavelengths at low cost and with good reproducibility.;SOLUTION: A phase grating mask 1 used for this manufacturing method has phase gratings formed respectively in N mutually isolated areas 11An (n=1 to 5) on a 1st surface 11 of a flat plate 10 made of quartz glass. On the 1st surface 11, the areas 11An (n=1 to 5) where the phase gratings are formed and flat areas 11Bn (n=0 to 5) where no phase grating is formed are present alternately in the (x)-axis direction. In the areas 11An (n=1 to 5), the thickness in the (z)-axis direction changes in a cycle of 2Lg along the (x) axis, thereby forming the phase gratings.;COPYRIGHT: (C)2002,JPO