METHOD FOR MEASURING CARRIER CONCENTRATION IN SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To accurately and rapidly measure carrier concentration distribution in a semiconductor.;SOLUTION: The method for measuring carrier concentration in a semiconductor includes a pretreatment process for pretreating a sample having a semiconductor layer when measuring carrier concentration in a semiconductor layer using a canning capacitance microscope, a detection process for detecting the capacitance of a sample by bringing the tip of a probe that the scanning capacitance microscope has into contact with the surface of the sample that has been pretreated, and a process for calculating the carrier concentration of the sample based on the detected capacitance. The pretreatment process includes a process for covering each of a plurality of samples having the same surface with at least one layer of single molecular films whose film thickness or permittivity differs, each single molecular film has known film thickness or permittivity, the detection process successively brings the tip of the probe into contact with the surface of each single molecular film to detect each of the capacitance of the sample.;COPYRIGHT: (C)2002,JPO