OPTICAL FUNCTIONAL ELEMENT, METHOD FOR MANUFACTURING WAVEGUIDE GRATING AND WAVEGUIDE GRATING OBTAINED BY THE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical functional element, the method of manufacturing a waveguide grating and the waveguide grating obtained by the same manufacturing method with which the refractive index modulation of about 10^-2 is obtained and the inexpensive and high-performance waveguide grating or the like is obtained by a relatively simple method.;SOLUTION: At the time of forming an optical waveguide region on a substrate by a vapor phase deposition method, the refractive index of the optical waveguide region is controlled by adjusting film formation conditions, and after the optical waveguide region having the desired refractive index has been formed, the optical waveguide region is irradiated with a laser beam and locally heated, the refractive index decided by the composition is resumed and thus, the optical waveguide region having the different refractive index is obtained.;COPYRIGHT: (C)2002,JPO