SYSTEM AND METHOD FOR FINDING OUT DEFECTIVE DEVICE IN SEMICONDUCTOR MANUFACTURING FACILITY

摘要

PROBLEM TO BE SOLVED: To provide a system and method for finding out defective devices (tools) in a semiconductor manufacturing facility which produces a semiconductor wafer.;SOLUTION: A data base containing data indicating the passing time of each wafer through each of a plurality of devices is prepared and whether or not each wafer has a certain kind of damage mark is discriminated by testing the wafers. The lot list of each device is prepared so that the arranging order of lot continuation in the list may indicate the process sequence of lots and a weight value is designated to each lot in the list, in such a way that a predetermined positive weight value is designated to the lot of a wafer having the damage mark and a negative weight value is designated to the lot of a wafer having no damage mark. A cumulative value is generated by continuously adding the weight value of each lot list corresponding to each device to each other, and the maximum cumulative value of each device is obtained by designating the maximum peak cumulative value to each device in the course of adding the weight values to each other.;COPYRIGHT: (C)2002,JPO