VACUUM TREATMENT APPARATUS HAVING ELECTROSTATIC ATTRACTION MECHANISM AND OPERATION CONTROL METHOD FOR ELECTROSTATIC ATTRACTION MECHANISM

摘要

PROBLEM TO BE SOLVED: To improve a quality of a substrate by suppressing the generation of particles due to electrostatic attraction and by improving the yield of the product, without decreasing a fixing performance of the substrate by using an electrostatic attraction mechanism and heating/cooling performance in a vacuum treatment apparatus having the electrostatic attraction mechanism.;SOLUTION: This apparatus comprises the electrostatic attraction mechanism for mounting and fixing the substrate, and is constituted so as to comprise a radiation thermometer 34 for detecting the temperature of the substrate 13, a temperature sensor 17 for detecting the temperature of the electrostatic attraction mechanism, and a comparator 38 that outputs a signal for operating the electrostatic attraction mechanism when the detected signals which each outputs are input and a difference of two detected signals is in a range satisfying a prescribed condition. The substrate is placed on the electrostatic attraction mechanism, if the electrostatic attraction mechanism is operated and the substrate is fixed and when the difference between the temperature of the substrate and the temperature of the electrostatic attraction mechanism became small to a degree of being included in a prescribed range, the electrostatic attraction mechanism is operated.;COPYRIGHT: (C)2002,JPO