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Method for fabricating a part depletion type SOI device preventing a floating body effect
Method for fabricating a part depletion type SOI device preventing a floating body effect
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机译:防止浮体效应的零件耗尽型SOI器件的制造方法
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摘要
Disclosed is a part depletion type SOI device capable of preventing a floating body effect and a method for fabricating the same. The part depletion type SOI device comprises physical isolated spaces on boundaries between a channel region and source/drain regions.
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