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Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing
Fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing
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机译:通过快速热退火制备高织构化锂钴氧化物薄膜
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摘要
Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques.
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