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Provisions for Vacuum Vapor Deposition plasma reinforced that include provisions for evaporation of a SolidProduction of Electric Arc Discharge and Measurement of Ionization and Evaporation
Provisions for Vacuum Vapor Deposition plasma reinforced that include provisions for evaporation of a SolidProduction of Electric Arc Discharge and Measurement of Ionization and Evaporation
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机译:等离子增强真空气相沉积法的规定,其中包括用于固体放电电弧放电的蒸发以及电离和蒸发测量的规定
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摘要
A method for producing an electric arc Discharge, which comprises the steps of: Feeding continuously a Plurality of components of electrode in seriesThrough accommodation of electrodes to a discharge position of Electric Arc, so that one of the Plurality of components of electrode is in the position of Electric Arc Discharge.R; and providing power to a component of electrode as an electrode component is Fed to the electric arc Discharge position and a Second electrode next toL an electrode Component, so the component of electrode and the Anode are loaded with Opposite charge, an electrode having a load Bearing Anode Cathodic and anodic charge,And create an electrical Arc Discharge between an electrode and the Anode Component, so that the Plurality of components of electrode can be Vaporized, in seriesIn the position of Electric Arc Discharge.An electrode FED continuously to carry out the method of claim 1,That includes: a Plurality of components of electrode that is Vaporized when downloaded in an electric arc Discharge; a Housing defining a Chamber for receiving the component LoadingIs electrode in series; and a Feeder for feeding components of electrode Components continuously The Plurality of electrodes in seriesThrough the accommodation to a discharge position of Electric Arc, so that one of the Plurality of components of electrode is in the position of Electric Arc Discharge.1an Electric Arc Discharge Device comprising the electrode FED continuously according to claim an Anode, 68,And a Power Supply for supplying electrical power to a component of electrode and Anode.So the component of electrode and the Anode are charged with Opposite charges having an electrode with the Anode and cathode loading cargo AnodeAnd create an electrical Arc Discharge between an electrode and the Anode Component, so that the Plurality of components of electrode can be Vaporized, in seriesIn the position of Electric Arc Discharge. Eml file = " 1 99048733 _" id = "1" = MFI JPEG
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