AN INDUCTOR OR LOW LOSS INTERCONNECT AND A METHOD OF MANUFACTURING AN INDUCTOR OR LOW LOSS INTERCONNECT IN AN INTEGRATED CIRCUIT

摘要

An Inductor Or Low Loss interconnect Acid A Method Of Manufacturing An Inductor Or Low Loss Interconnect In An Integrated CircuitABSTRACTAn integrated circuit with a buried layer for increasing the Q of an inductor formed in theintegrated circuit. The substrate includes a highly doped buried layer formed between less doped layers. This provides a high Q inductor while preserving device and latchup characteristics. The inductor mayalso include an increased thickness conductive layer in the inductor to further increase Q. The present invention is also directed to a low loss interconnect.Figure 1