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C-AXIS PEROVSKITE THIN FILMS GROWN ON SILICON DIOXIDE
C-AXIS PEROVSKITE THIN FILMS GROWN ON SILICON DIOXIDE
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机译:在二氧化硅上生长的C轴钙硅钙石薄膜
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摘要
A method and resulting structure for growing a crystalline perovskite film (16) on a silicon dioxide layer (12) by means of an intermediate template layer (14) of a c-axis oriented layered perovskite, such as bismuth titanate. The perovskite film can be ferroelectric lead-lanthanum zirconate titanate or conductive cubic metal oxides used as electrodes for the ferroelectric.
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