SYNTHETIC QUARTZ GLASS POWDER, QUARTZ GLASS MOLDINGS, HIGH PURITY TETRAALKOXYSILANE, AND PRODUCTION METHODS THEREOF

摘要

A method for producing a high purity synthetic quartz powder, characterized by using a tetramethoxysilane having a trimethoxymethylsilane content of at most 0.3 wt%, and converting it to a synthetic quartz by a sol-gel method.