A CAPACITIVE FORCE-SENSING TRANSDUCER WITH A DEFORMABLE SUPPORT

摘要

The present invention relates to a capacitive force-sensing transducer with a deformable support. The transducer comprises paired nondeformable support, paired capacitive electrode plates and a deformable support. The ends of each paired nondeformable supports are fixed on the middle portion of the deformable support parallelly, capacitive electrode plates are set oppositing each other, and are flat plates or curved surface plates/spherical surface plates having the same curvature radius one bigger another one smaller, and wherein the curved surface plates/spherical surface plates are one concave another one convex, and the capacitive electrode plates are made of insulating material, and conductive then A1 films are disposed on the opposited surfaces. The said deformable support is rod-shaped, tube-shaped or slab-shaped. The said nondeformable supports are rod-shaped, tube-shaped or slab-shaped. A force-transmitting plate is disposed on the end surface of one end of the deformable support, or two force-transmitting plates are disposed on the end surfaces of both ends of the deformable support. The transducer also comprises a annular electrode, this annular electrode is mantled concentrically at the outside of the force-transmitting plate or the outside of the radial nondeformable support. The configuration according to the present invention is simple, and the measuring error of the deformable support dueing to the appended bending is corrected, while being able to maintain the hifh sensitivity, thereby the repeatable accuracy thereof is improved.