首页>
外国专利>
Tunable Fabry-Perot microelectromechanical resonator with optical power-dependent tuning
Tunable Fabry-Perot microelectromechanical resonator with optical power-dependent tuning
展开▼
机译:具有依赖于光功率的调谐的可调谐Fabry-Perot微机电谐振器
展开▼
页面导航
摘要
著录项
相似文献
摘要
A tunable optical resonator[100] constructed from a fixed mirror[14] and a moveable mirror[13]. The fixed mirror[14] is attached to a substrate having a first electrically conducting surface. A support member[15-18] having the moveable mirror[13] supported thereon and a second electrically conducting surface is suspended above the substrate such that the moveable mirror[13] is separated from the fixed mirror[14]. A light output port[13] transmits a light signal of a wavelength determined by the distance between the fixed and moveable mirrors[13]. An optical circuit[102,104] measures the power level of the light signal and generates an electrical signal that depends on the measured power level. A frequency adjustment circuit[106,120], responsive to the electrical signal and a tuning voltage, applies an electrical potential between the first and second electrically conducting surfaces. The electrical potential causes the distance to remain at a distance determined by the tuning voltage independent of the power level for power levels less than a predetermined power level.
展开▼