SINGLE MODE OPERATION OF MICROELECTROMECHANICALLY TUNABLE, HALF-SYMMETRIC, VERTICAL CAVITY SURFACE EMITTING LASERS

摘要

A method is provided for fabricating a microelectromechanically tunable vertical-cavity surface-emitting laser (4) with precise lateral and vertical dimensional control. MEM-tunable VCSEL structures are provided which include a gain medium (6) located in a mechanically tunable high-Q Fabry-Perot cavity (8) formed by an upper (12) and lower (10) reflective dielectric film stack. Tuning is achieved by translational movement of the upper cavity-tuning reflective dielectric film stack (12) in a controlled electrostatic field. The current invention deals with the intracavity electrical contacts for current injection for this type of the MEM-tunable VCSEL. The current invention also includes various mechanisms to control the current injection profile so as to ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL.