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Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers
Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers
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机译:微机电可调,半对称,垂直腔表面发射激光器的单模运行
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摘要
A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers with precise lateral and vertical dimensional control. Microelectromechanical tunable vertical cavity surface emitting laser structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field. The current invention deals with the intracavity electrical contacts for current injection for this type of MEM-tunable VCSEL's. The current invention also includes various mechanisms to control the current injection profile so as to ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL's.
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