Microelectromechanical Scanner Using a Vertical Cavity Surface Emitting Laser

摘要

Optical scanners play a prominent role in the commercial and military industries.The scanner's size, cost and reliability are critical characteristics. In this research a microoptical scanning system was fabricated by incorporating a vertical cavity surface emitting laser (VCSEL) onto a surface machined microelectromechanical die. The micro optics for laser beam steering includes a 135 deg mirror, a Fresnel lens, a lateral scanning rotating mirror, and a vertical scanning fan mirror. The VCSEL was attached to the die by solder and electrical connection was provided by wire bonding. Based on far field measurements the scanner had a lateral scan angle of 5.7 degrees and a vertical scan angle of 4.4 degrees. Based on spot diameter measurements at the fan mirror the scanner had a divergence angle of 0.524 degrees. The potential military applications of these scanners include laser radars, laser detectors, holographic storage devices, and data links between integrated circuit chips.