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Light Modulator and Method for Manufacturing the Same
Light Modulator and Method for Manufacturing the Same
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机译:光调制器及其制造方法
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摘要
PURPOSE: An optical modulator is provided to solve a fixation problem of an upper layer and a lower layer such that the fixation problem occurs in eliminating a sacrificial layer by using a supporting beam, and to remarkably increasing a rotating displacement by adopting a seesaw structure using a lever rule. CONSTITUTION: A lower electrode(11) is formed on a substrate(10). An upper electrode structure(12) is vertically separated from the lower electrode, capable of rotating. A rotating displacement structure(15) can be rotated by the rotation of the upper electrode structure. The first and second lower supporting beams(13,14) support the upper electrode structure and the rotating displacement structure, respectively.
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