METHOD FOR MANUFACTURING SILICON OPTICAL BENCH AND MOUNTING STRUCTURE OF PHOTO DIODE CHIP BY USING V-GROOVE SILICON BLOCKS

摘要

PURPOSE: A method for manufacturing a silicon optical bench and the mounting structure of a photo-diode chip by using V-groove silicon blocks are provided to prevent degrading of a laser diode by arranging the incidence surface of the laser diode to cross the optical axes of the photo diode. CONSTITUTION: A silicon optical bench(100) includes the first V-groove(120) for mounting a laser-diode chip(12) and the second V-groove(130) for mounting a photo-diode chip(10) respectively formed on the top surface of the bench(100). The first V-groove(120) and the second V-groove(130) are arranged to be aligned with the optical axis. The second V-groove(130) is provided with a plurality of silicon blocks(132) for positioning the photo-diode chip(10) such that its cross-section is inclined toward the optical axis to have a desired gradient.