/ 2 Two-step hybrid surface treatment and modification for the formation of high quality ohmic contacts of optoelectronic amp;electronic devices

摘要

The invention according to fabricate various types of optoelectronic devices and electronic devices, for forming an improved ohmic contact (Ohmic Contact) 2 phase hybrid surface reforming; relates to (TSHTM Two-Step Hybrid Surface Treatment & Modification), the invention According, there by performing a surface modification according to the respective chemical solution or gas plasma just before mesa etching and the metal thin film formed on the electrical, thermal and structural properties can form a good ohmic contact.