Hole drilling apparatus using Elctron beam

摘要

The invention to be able to, but form a melted hole locally, by controlling the electron beam size of only the electron gun without the external device to control the size of the holes is irradiated with an electron beam accelerated in the material, such as metal, ceramic, semiconductor, glass, of the electron beam relates to a puncturing apparatus using an electron beam that increases the spatial uniformity improve the quality of the perforation,; Including the electron gun for generating an electron beam and a processing chamber such that the electron beam is locally melted and perform the drilling operation for drilling the object generated by the electron gun, the gate valve to isolate the vacuum between the electron gun and the processing chamber; The electron gun when the high voltage is applied between the the anode which is heated in accordance with the power-generating hot electrons, and the negative electrode arranged between the anode to withdraw the hot electrons generated in the negative electrode in the form of a beam, said cathode and anode and according to the voltage to be applied it is characterized in that comprising a triode type including a control electrode for controlling the size of the electron beam by changing the electric field distribution between the cathode and the anode.