METHOD FOR MANUFACTURE OF CONDUCTING ALLOY-TREATED DIAMOND-LIKE NANOCOMPOSITE FILM AND CONDUCTING ALLOY-TREATED DIAMOND-LIKE NANOCOMPOSITE FILM

摘要

FIELD: manufacture of conducting alloy-treated diamond-like nanocomposite film composed of such basic elements as carbon, silicon, metal, oxygen and hydrogen. SUBSTANCE: the method consists in the following. A holder with a backing is placed in a vacuum chamber, a voltage of 0.3 to 5.0 kV is applied to it. A gas-discharge plasma with an energy density exceeding 5 kWh/gram-atom of carbon particles is produced, and organosiloxane is evaporated into it. A beam of particles of alloying material is introduced in the plasma, film growth on the backing is accomplished, and a conducting alloy-treated carbon nanocomposite film is obtained. Films having a definite relation of atomic concentrations of carbon, metal and silicon are selected. The film surface is coated with a layer of silicon dioxide. Alternating unipolar current is passed through the film in the current generator condition, and electric heat treatment is carried out. As a result, a conducting alloy-treated diamond-like nanocomposite film having a layer structure is obtained. EFFECT: produced diamond-like films, having a thermally stable nanostructure, possessing stable electric properties. 9 cl, 3 dwg