Formation of high-conducting nanostructures in low-conducting diamond-like carbon films using SPM-lithograph

摘要

Low-conducting hydrogenated diamond-like carbon (DLC) a-C:H films were examined for the purpose of nanometer-scaled modifications under the action of local electrical field. The capabilities of SPM technique for preparation of conducting nanostructures in the low-conducting a-C:H films have been demonstrated for the first time.