Production of trichlorosilane for producing silane, silicon, dichlorosilane or adhesion promoter involves using catalyst containing iron

摘要

In the production of trichlorosilane (HSiCl3) by reacting silicon (Si) with hydrogen (H2), Si tetrachloride (SiCl4) and optionally hydrogen chloride (HCl), reaction is carried out in the presence of a catalyst containing iron (Fe), excluding a catalyst containing Fe bromide or iodide in the presence of copper.