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A method and apparatus for generating globular grains of ultrapure - silicon with diameters of 50 mu m to 300 mum and their use
A method and apparatus for generating globular grains of ultrapure - silicon with diameters of 50 mu m to 300 mum and their use
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机译:产生直径为50μm至300μm的超纯硅球状颗粒的方法和设备及其用途
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摘要
The invention relates to a method and a device for producing globular grains of high-purity silicon by atomising a silicon melt (6) in an ultrasonic field (10). Globular grains having a grain size of between 50 mu m and 300 mu m can be produced by means of said method and device and can be used to separate high-purity silicon from silane in the fluid bed. The silicon melt (6) is fed into the ultrasonic field (10) at a distance of 50 mm in relation to a field node, and the atomised silicon leaves the ultrasonic field (10) at a temperature close to the liquidus point. The invention also relates to a use of the product produced according to the inventive method or using the inventive device, as particles for producing high-purity silicon from silane in a fluid bed.
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