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device for the manufacture of barriereschichten for gaseous and / or liquid substances on substrates, especially kunststoffsubstraten, by means of a plasmagestu00fctzten vapour deposition in a vakuumbehandlungskammer
device for the manufacture of barriereschichten for gaseous and / or liquid substances on substrates, especially kunststoffsubstraten, by means of a plasmagestu00fctzten vapour deposition in a vakuumbehandlungskammer