Electromagnetic, especially infrared, radiation detector has reading circuit connected to a support by Van Der Waals forces, i.e. by molecular adhesion, without adhesives or equivalent means

摘要

Electromagnetic, especially infrared, detector comprises a reading circuit (7) on support (11) and connected electrically to a detection circuit (8), optionally on a support, by indium or tin/lead alloy microspheres using 'flip-chip' technology. Reading circuit (7) is connected to its support (11) by Van Der Waals forces, i.e. by molecular adhesion, without adhesives or equivalent means. Preferred Features: The support (10) for the radiation detection unit is transparent to the radiation or absorbs it to a limited extent. The reading circuit (7) is intended for processing some of the electrical signals emitted by the detection circuit, and it is connected to a germanium, gallium arsenide or sapphire support (11), which, in turn, is connected directly or indirectly to a cold source. An Independent claim is given for a method for production of the electromagnetic, particularly infrared, radiation detector described above. The method includes connecting the back surface of the reading circuit (7) to a support (11) such that Van Der Waals forces operate at the level of the interface according to molecular adhesion technology using a thermal oxide layer on the joining surfaces. The reading circuit (7) and its substrate (11) are subjected to sealing annealing at 200-300 degrees C. The thickness of the silicon layer constitutive of the reading circuit (7) is reduced, in order to limit the inherent effects due to thermal expansion of the reading circuit (7) with respect to those of its substrate (11)