Material synthetic manner and material synthesizer unit

摘要

PURPOSE: To provide a substance synthesizing method capable of synthesizing a super high purity substance while controlling composition ratio with the lebel of isotope. ;CONSTITUTION: A positive ion of Si and a negative ion of Si are generated respectively and independently, and ²⁸Si⁺ is selected from the positive ion of Si by a mass separation and ³⁰Si^- is selected from the negative ion of Si by the mass separation. A Si substrate 1 is irradiated semultaneously with ion beams 3 of ²⁸Si⁺ and ion beams 4 of ³⁰Si^-. In this way, the mixed layer 2 consisting of ²⁸Si⁺ and ³⁰Si^-. In this way, the mixed layer 2 consisting of ²⁸Si⁺ and ³⁰Si^- is formed on the Si substrate 1.;COPYRIGHT: (C)1996,JPO