Multi-stage type partition formation modulo null of discharge

摘要

PROBLEM TO BE SOLVED: To improve a discharge characteristic, and to cope with high resolution by forming a resin coating film on the upper surface and the side surface of a barrier rib formed in a low height and a thin width, and forming the resin coating film in a prescribed height by a sand blast or the like in the next place. ;SOLUTION: A barrier rib material 6 is formed in a thickness of about 150 μm on a back face glass substrate 5. A pattern is formed by coating the upper surface with a photosensitive coating film so that the barrier rib material 6 is carved up to the depth of about 20 to 30 μm by a chemical etching method or a sand blast method. Next, the whole coating film of the pattern is separated and removed. Afterwards, a protective resin 9 is applied on the upper surface and the side surface of the barrier rib material 6 formed in a height of about 20 to 30 μm by a screen printing method or the like to be dried. Then, the barrier rib material 6 is deeply carved again by a sand blast method to be formed as a partition wall 1 having a desired height. Afterwards, the protective resin 9 is removed by using a release agent to complete the barrier rib 1 by baking. The protective resin 9 can also be burnt away simultaneously with baking of the barrier rib 1.;COPYRIGHT: (C)1999,JPO