Structure and heat and pressure arrival manner and heat and pressure arrival device null of hi - tatsu -

摘要

PURPOSE: To make constant the bonding temperature over the entire thermocompression face of a heater tool by forming a pair of temperature control openings having volume increasing gradually from the central point of a plane facing the thermocompression plane at a heating part toward the opposite ends in the longitudinal direction of the heating part at a plurality of points in the thermocompressing direction. ;CONSTITUTION: A temperature control opening 45 is made in the plane 41e facing the thermocompression plane 41d of a heater tool 41 while being enlarged toward the opposite ends in the longitudinal direction of a heating part 41a. Consequently, the heating current path is limited toward the opposite ends in the longitudinal direction and the resistance is increased as compared with the central part thus increasing the Joule's heat. In other words, temperature at the opposite ends of the heating part 41a is elevated and sustained higher than the central part thus ensuring an averaged temperature distribution as a whole. With such structure, the bonding temperature can be sustained at a constant level over the entire thermocompression plane of the heater tool and the effective length can be lengthened correspondingly.;COPYRIGHT: (C)1996,JPO