SEMICONDUCTOR OPTICAL MODULATOR, MACH-ZEHNDER TYPE OPTICAL MODULATOR USING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR OPTICAL MODULATOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor optical modulator in which the reflection of a high frequency electric signal from an element is suppressed and a driving voltage is minimized a Mach-Zehnder type optical modulator using the semiconductor optical modulator, and a method of manufacturing the semiconductor optical modulator.;SOLUTION: An optical waveguide core layer 3 is so formed on a conductive substrate 2 on which micro optical modulators 10A and gap regions 10B are alternately formed that the optical waveguide core layer 3 is alternately intersected with the micro optical modulators 10A and the gap regions 10B by forming an insulating material 6 at every prescribed interval. Further, a metallic electrode (signal) 8b is connected to the optical waveguide core layer 3 in the micro optical modulator 10A via a conductive semiconductor 5, and a metallic electrode (ground) 9 is connected via the conductive substrate 2. Further, the metallic electrode (signal) 8b in respective micro optical modulators 10A are connected with metallic wires 8a. The regions between the optical waveguide core layer 3 and the signal and ground metallic electrodes (8b, 9) are formed with a conductive semiconductor material. Whereas the optical waveguide core layer 3 is interposed by an insulating semiconductor material in the gap region.;COPYRIGHT: (C)2003,JPO