ELECTRON EMITTING DEVICE AND MANUFACTURING METHOD FOR IT, COLD CATHODE FIELD ELECTRON EMITTING ELEMENT AND MANUFACTURING METHOD FOR IT, COLD CATHODE FIELD ELECTRON EMITTING DISPLAY DEVICE AND MANUFACTURING METHOD FOR IT, AND METHOD FOR ETCHING THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a cold cathode field electron emitting element, capable of sharpening a part to emit an electron in an electron emitting part composed by a carbon based material.;SOLUTION: This method for manufacturing the cold cathode field electron emitting element is provided with a process to form a thin film 20 of a metal or a metal compound on a cathode electrode 11 formed on a supporting body 10, a process to form an island-shaped electron emitting part forming region 22 comprising the thin film 20 left by applying anisotropic etching to the thin film 20 with a corpuscle 21 as an etching mask after disposing the corpuscle 21 on the thin film 20, and a process to selectively form an electron emitting part 15 of crystalline graphite on the electron emitting part forming region 22 based on a CVD method.;COPYRIGHT: (C)2003,JPO