MANUFACTURING METHOD OF ELECTRON EMITTING UNIT, MANUFACTURING METHOD OF COLD CATHODE FIELD ELECTRON EMITTING ELEMENT, AND MANUFACTURING METHOD OF COLD CATHODE FIELD ELECTRON EMITTING DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a flat type cold cathode field electron emitting element that is capable of forming electron emitting units having uniform and well-controlled convex and concave parts.;SOLUTION: This is a manufacturing method of a cold cathode field electron emitting element that is comprised of a cathode electrode 11, an electron emitting part 15 that is composed of a plurality of electron emitting units 15A formed on the cathode electrode 11, and a gate electrode 13 that is arranged over the electron emitting part 15 and has an opening part 14A. The electron emitting units are formed by (A) a process for forming the base layer 21 on the cathode, (B) a process in which a convex-shape base layer 21 is left on a part of the cathode electrode by electrolyzing the base layer 21, and (C) a process in which an electron emitting layer 22 is formed on the cathode electrode 11 and on the base layer 21.;COPYRIGHT: (C)2003,JPO