STANDARD SAMPLE FOR ELECTRONIC PROBE MICROANALYSER AND MANUFACTURING METHOD OF STANDARD SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a standard sample for an electronic probe microanalyser (EPMA) enabling highly accurate measurement of an analytical region with desired material and analytical conditions and improvement of analytical preci sion or reliability, and a manufacturing method of the standard sample for the EPMA.;SOLUTION: In this standard sample for the electronic probe microanalyser, electron beams are emitted, and X-rays generated inside are detected, to thereby measure the analytical region. The sample has a constitution wherein a membrane to be analyzed is formed on a substrate and the thickness or the width of the membrane to be analyzed is gradually changed at a constant rate. Otherwise, the sample has a constitution wherein the sample thickness or the sample width of a part of the bulk sample comprising an element to be analyzed is gradually changed, or wherein the sample thickness or the sample width of the whole sample comprising the element to be analyzed is gradually changed.;COPYRIGHT: (C)2003,JPO