Method for manufacturing nano- meter standard prototype , standard sample , nanometer standard prototype , and manufacturing method of the standard sample

摘要

PROBLEM TO BE SOLVED: To provide a nanometer standard which is superior in corrosion resistance to substances in the atmosphere and has high accuracy.;SOLUTION: A standard sample as the nanometer standard has a standard length being a reference for comparison. The standard sample has an SiC layer having a step/terrace structure formed therein. A height of a step is equal to a height of a full unit corresponding to one cycle in a lamination direction of SiC molecules or a height of a half unit corresponding to half a cycle in the lamination direction of SiC molecules. The height of the step is used as the standard length.;COPYRIGHT: (C)2012,JPO&INPIT