ORIENTATION MEASURING DEVICE OF SINGLE CRYSTAL, DETECTION METHOD OF ANGLE ERROR OF GUIDE MEMBER IN THE DEVICE AND ORIENTATION MEASURING METHOD OF SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To execute both orientation measurement performed by irradiating the end face with an X-ray such as cut face measurement and orientation measurement performed by irradiating the peripheral face with the X-ray such as the orientation measurement of an orientation flat face by a common measuring device without requiring relocation of a measuring object.;SOLUTION: This device has an X-ray source F rotatable around an ω axis, for generating X-rays for irradiating a single crystal S, an X-ray detector 9 rotatable around the ω axis, and a rotational driving mechanisms 18, 19, 20 for rotationally moving the X-ray source F, the X-ray detector 9 and the ωaxis collectively around a χ axis roughly perpendicular to the ω axis. The rotational driving mechanisms rotate the X-ray source F, the X-ray detector 9 and the ω axis collectively between the position where the ω axis becomes roughly perpendicular to the axis X₀ of the single crystal S and the position where the ω axis becomes roughly parallel to the axis X₀.;COPYRIGHT: (C)2003,JPO