PIEZOELECTRIC ELEMENT, DEVICE AND METHOD FOR FORMING PIEZOELECTRIC THIN FILM, INK JET HEAD USING THE SAME, AND PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To enable size reduction by increasing a piezoelectric constant as to a piezoelectric element, a device and method for forming a piezoelectric thin film, an ink jet head using it, and a pressure sensor.;SOLUTION: A piezoelectric body 3B has electrodes on both its top and reverse surfaces and is formed of a Perovskite oxide thin film consisting principally of lead (Pb), zirconia (Zr), and titanium (Ti).;COPYRIGHT: (C)2003,JPO