PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE WITH THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY WITH THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER WITH THE PIEZOELECTRIC GENERATING ELEMENT

摘要

Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention comprises: a LaNiO₃ film having a (001) orientation; a NaNbO₃ film having a (001) orientation; and a (Bi, Na, Ba) TiO₃ film having a (001) orientation. The LaNiO₃ film, the NaNbO₃ film, and the (Bi, Na, Ba)TiO₃ film are laminated in this order.