MEMBRANE-TYPE SENSOR, ITS MANUFACTURING METHOD, AND FLOW SENSOR

摘要

PROBLEM TO BE SOLVED: To suppress reduction in the TCR(temperature coefficient of resistance) of wiring parts in a membrane-type flow sensor as much as possible.;SOLUTION: A lower insulating film, a close adhesion layer formed of a metallic oxide such as a Ti oxide, a resistance film formed of metal such as Pt, and an upper insulating film such as a silicon nitride film are sequentially laminated on a substrate 1. The laminated films of the close adhesion layer and the resistance film are patterned in a zigzag shape to constitute a fluid thermometer 3, a temperature detecting element 4, and a heater 5 in the flow sensor. A film member 11 formed of the same material as that of the wiring parts 3-5 is provided on the lower insulating film in such a way as to surround the wiring parts 3-5 in the same plane as the wiring parts 3-5.;COPYRIGHT: (C)2003,JPO