AUXILIARY HEAT-RETENTION JIG, ITS MANUFACTURING METHOD, WAFER BOAT WITH HEAT INSULATOR IN PLATE FORM, VERTICAL HEAT TREATMENT EQUIPMENT, METHOD FOR MODIFYING THE SAME AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an auxiliary heat-retention jig necessary for modifying a fast thermal process system of medium temperature type into a fast thermal process system of high temperature type.;SOLUTION: The auxiliary heat-retention jig 1 is placed between a wafer boat 4 and a heat-retention jig 2. The auxiliary heat-retention jig 1 is provided with vertically arranged several heat insulators 7 in plate form. The heat insulators 7 are formed of opaque quartz.;COPYRIGHT: (C)2003,JPO